Comparison of operating principle for inclination sensor.
The two different operating principle for inclination sensor are:
1) Fluid based measuring cell
2) MEMS ( Micro electro mechanical system)
Features of Fluid based inclination sensor:
- High accuracy
- Small temperature drift
- Extended temperature range
- Rugged metal housing
- Large measuring range
- High end BSI are based on Fluid based principle
Features of MEMS based inclination sensor:
- Less influence of vibration
- 2 axis measurement needs only one MEMS chip.
- Low cost , Suitable for mobile applications